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A novel micro-scale co-ordinate measuring machine (CMM) probe designed for use on CMMs for miniature parts. The probe is designed to overcome many of the adverse effects experienced by standard micro-scale CMM probes, while still maintaining Main Features · MEMS design, resulting in increased robustness · Silicon free design ·...

Published: 1/17/2012 | Inventor(s):

Keywords(s): CMM, Measurement, MEMS, Micro, Piezo-electric

Category(s): Electronics, Engineering, Instrumentation, Measurement, Physical Sciences