A novel micro-scale
co-ordinate measuring machine (CMM) probe designed for use on CMMs for miniature
parts. The probe is designed to overcome many of the adverse effects experienced
by standard micro-scale CMM probes, while still
maintaining
Main
Features
·
MEMS design,
resulting in increased robustness
·
Silicon free
design
·
Piezo-electric
actuators enabling non-contact tactile probing
·
Isotropic probing
forces
·
Stylus tip diameters
of 70 µm (tungsten tip)
·
High aspect ratio
stylus
Applications
·
3D co-ordinate
metrology of miniature parts
·
metrology of
miniature parts fabricated from novel materials
·
Measurement of
micro-structures below 100 µm including
·
Micro channels in
micro-fluidic devices
·
MEMS devices and side
walls
·
Medical
devices
·
Micro-electronics
·
Micro moulds for
injection moulding or embossing
·
Plastic
parts
Developmental
Status
The development
status of the current technology is around TRL 3-4
Availability
Available for
licensing or further collaboration/ development
IP
Status
Patent filed by
Department of Business, Innovation and Skills
Technical
The novel MEMS based
triskelion (three legged) design allows for isotropic probing in 3D. The
piezo-electric actuators deposited onto each leg/flexure allow the device to be
vibrated in 3D. These vibrations counteract the surface forces prevalent at the
micro-scale that hinder micro-co-ordinate measurements taken by other
probes.
Figure 1: Diagram of device
Figure 2: Real device (with scale bar) in its silicon substrate
holder
